Ground Master
Equipment Ground Monitors
Ground Master
Ground Monitors
Models
CTC065
CTC065RT
Know whether your equipment is properly
grounded at all times
Applications
Front-End Semiconductors
Photolithography Equipment
Wafer Handlers
Back-End Semiconductor Tools
GMR Head Testers
Any Sensitive Equipment Locations
Industrial Robotics
Tool Clusters
Medical Environment
Military
Wherever ESD and EMI are an Issue
Features
Continuous ground monitoring
ANSI/ESDA S.20.20 compliant
Adjustable alarm threshold
EMI monitoring on each ground
Safety protection for each ground
Enable switches for each ground
Industrial network interface
Connection to Facility Monitoring
System
Connection to the Tool
www.credencetech.com
Proper grounding is crucial for safe and uninterrupted operation of equipment. In
critical environments broken ground connection may result in personnel exposure to
dangerous voltage, equipment lockup or malfunction and damage to sensitive compo-
nents.
Ground Master offers continuous monitoring of proper ground connection of up to 8
tools and up to 16 tools in tandem with another Ground Master. With individual
status indication, Ground Master shows which ground connection is being monitored,
which one is OK and which one has failed. Enabling switches for each ground
connection allow for accurate and safe indication.
With safety in mind, every ground connection has individual easily-replaceable fuse to
prevent dangerous voltages from miswiring propagating to other equipment.
In addition to ground connection, Ground Master offers monitoring of EMI on each
ground, assisting in diagnostics of lockups and malfunction.
Ground Master provides intelligent information to a facility monitoring system with
detailed status on each ground connection. Ground Master RT provides relay closure
and logic signal to the tool so that it can be shut down in case of ground failure.
Key Advantages
ANSI/ESDA S.20.20
Compliant
Ground Master measures ground impedance
in accordance with requirements of ANSI/
ESDA S.20.20 standard.
Adjustable Alarm Threshold
The alarm threshold can be easily adjusted at
any time in a range of 1 to 20 Ohms
Safety
Each ground connection is protected by
individual fuses to protect equipment in case
of miswiring of neutral, power and ground.
EMI
Ground Master monitors EMI on each
ground and indicates EMI status
Output to Data Acquisition or
Facility Monitoring System
Ground Master monitors provide intelligent
output to a data acquisition or facility
monitoring system. Power can be supplied
via the same cable from FMS as well.
Output to the Tool
Ground Master RT provides relay closure
and logic signal to the tool to shut it down
when any of the grounds fail.
Credence
Technologies
