参数资料
型号: LIS3L02DS
厂商: STMICROELECTRONICS
元件分类: 模拟信号调理
英文描述: SPECIALTY ANALOG CIRCUIT, PDSO24
封装: PLASTIC, SO-24
文件页数: 14/18页
文件大小: 511K
代理商: LIS3L02DS
5/18
LIS3L02DS
1
FUNCTIONALITY
1.1 Sensing element
The THELMA process is utilized to create a surface micro-machined accelerometer. The technology al-
lows to carry out suspended silicon structures which are attached to the substrate in a few points called
anchors and free to move on a plane parallel to the substrate itself. To be compatible with the traditional
packaging techniques a cap is placed on top of the sensing element to avoid blocking the moving parts
during the molding phase.
The equivalent circuit for the sensing element is shown in the below figure; when a linear acceleration is
applied, the proof mass displaces from its nominal position, causing an imbalance in the capacitive half-
bridge. This imbalance is measured using charge integration in response to a voltage pulse applied to the
sense capacitor.
The nominal value of the capacitors, at steady state, is few pF and when an acceleration is applied the
maximum variation of the capacitive load is few tenth of pF.
Figure 1. Equivalent electrical circuit
Cs1x
Cs2x
Cps1
Cps2
Cpr
Rs2
Rs1
Rr
S1x
rot
S2x
Cs1y
Cs2y
Cps1
Cps2
Cpr
Rs2
Rs1
Rr
S1y
S2y
Cs1z
Cs2z
Cps1
Cps2
Cpr
Rs2
Rs1
Rr
S1z
S2z
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