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Micromachined Silicon Pressure Sensors
Uncompensated and
Compensated and Calibrated
XPXL, XPX,
XPCL, XPC Series
Sensing and Control
FEATURES
Low Cost, Small Size
Temperature
Compensated
Zero and Span Calibrated
MilliVolt Output
Differential, Gage and
Absolute Pressure
Constant Voltage
Excitation
High Impedance — Low
Current
TYPICAL APPLICATIONS
Medical Applications
Applications Requiring
Small Size
Applications Requiring
Vacuum and Positive
Pressure Reference, or
Both
WARNING
PERSONAL INJURY
DO NOT USE these products
as safety or emergency stop
devices or in any other
application where failure of
the product could result in
personal injury.
Failure to comply with these
instructions could result in
death or serious injury.
The XPXL/XPX and XPCL/XPC Series sensors integrate silicon
micromachined sensing technology, temperature compensation, and
calibration in a complete family of low-cost packages. This series offers
the most cost-effective solution for design requirements.
These piezoresistive pressure sensors use micromachined silicon
chips mounted on a ceramic and protected with a plastic cap. Several
tube arrangements with nylon housings are available for various pressure
applications.
On devices of 5 psi and above, the topside of the chip is protected
against humidity by a Silgel coating. While the sensors are designed for
use with noncorrosive, nonionic pressure media, they accommodate
many gases that are used in medical applications.
WARNING
MISUSE OF DOCUMENTATION
The information presented in this product sheet is for reference only.
Do not use this document as product installation information.
Complete installation, operation, and maintenance information is
provided in the instructions supplied with each product.
Failure to comply with these instructions could result in death or
serious injury.